Microsystem Technology

Microsystem Technology

Number of page: 500
Author: Wolfgang Menz
Publisher: John Wiley & Sons, 2008
Rating:
Category: Science

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.